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 Title 
Thin-film and depth-profile analysis / edited by H.Oechsner ; with contributions by H.W. Etzkorn ... [et al.]
 ISBN  354-013-320-8
 Imprint  Berlin ; New York : Springer-Verlag, 1984
 Call Number  QC176.84.S93 T46
 Physical  xi, 205 p. : ill.
 Subject  Thin films--Surfaces
 Subject  Surface chemistry
 Subject  Sputtering (Physics)
 Coorperative Author  Oechsner, H. (Hans)
 Coorperative Author  Etzkorn, H. W.
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